Time-of-flight Spectrometer tsh300

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Benefits

The powerful add-on, Time-of-Flight Secondary Ion Mass Spectrometer for Helium Ion Microscopes (TSH300), is a secondary ion extraction optics with which all secondary ion masses can be measured in parallel. This reduces ion-induced influences on the sample to a minimum. The combination of high-resolution secondary electron images and laterally resolved element identification offers great potential for the analysis of nano and microstructures.

In addition, many depth profiles can be obtained by ion sputtering, which enables a look “under” the sample surface. In this way, element depth profiles of the sample can be determined. Thus, so-called end-point detection becomes available when it comes down to removing material only up to a certain interface.

Benefits:

• High precision: Enables element identification on a
  nanometer scale
• Wide range of applications: Suitable for nanoelectronics ,
  microbiology , materials research and geosciences
Minimal sample influence: Reduces ion induced influences
on the sample
• Depth profile analysis: Provides the ability to create depth
  profiles to look below ” the sample surface
• Integrated software: Enables automated data acquisition
  and fast analysis
Datasheet Ion Helium Spectrometer TSH300 (286.04 KB)Download here

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What we offer

• Delivery and installation including commissioning of the TSH300 on your helium-ion microscope
• Software for automated data acquisition
• Analysis software for quick and uncomplicated extraction of element distributions from the measurement data obtained
• Training in handling this unique technique