

The TSH (Time-of-Flight Secondary Ion Mass Spectrometer for Helium Ion Microscopes) 300 is a time-of-flight mass spectrometer that was developed as an add-on measuring instrument for special use on helium / neon ion microscopes (HIM). It combines the excellent imaging capabilities of a HIM with the ability to identify elements on the nm scale. One unique feature is the excellent spatial resolution: the secondary ions deliver a lateral resolution on nanometer scale. This high resolution offers great potential for analyzes in the areas of nanoelectonics, nano- and microbiology, geosciences and materials research.
The application areas for the TSH300 include all areas of materials science and material testing. The add-on can also be used for element analysis in micro- and nanoelectronics as well as for finding tracer elements in labeled samples in micro- and nanobiological samples.
Dr. René Heller
Ion Beam Analysis
Phone: +49 351 260 3617
Dr. Nico Klingner
Ion induced Nanostructures
Phone: +49 351 260 2524
tsh@hzdri.de