Tensormeter - HZDR Innovation

A new dimension of resistance measurements

With the tensormeter, all components of the electrical resistance of thin layers, such as silicon wafers, can be measured quickly and precisely with one measurement. The tensormeter determines the complete resistance tensor of one or more thin-film samples, which would otherwise require a large number of measuring devices and complex measurement setups. In addition, the tensormeter measures precisely in high resolution and with the lowest noise without sample structuring (e.g. lithography).

Tensormeter RTM1

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One device for all measurements

Tensormeter RTM1 is the first integrated measuring device that enables the simultaneous measurement of all components of the electrical resistance tensor, even on unpatterned thin films and down to nano-ohm precision. It thus replaces all standard devices for resistance measurements such as lock-in amplifiers, source-measure-units, precision multimeters and switching matrix and combines them in one device.

Learn more about the device in our product video.

Simpler measurements, better results

Your benefits at a glance:

Measure Sheet & Hall resistance at high precision and extremly low noise
Measure irregularly shaped samples without need for lithographic patterning
Replace Lock-in Amplifier, Source Measure Unit, Digital Multimeter, Analog Matrix Switch
Save measuring time, achieve higher throughput

Application areas

Tensormeter can be used for a variety of measuring applications within thin film characterization, wafer and device testing as well as materials research.

With only one device and one automated measurement a full set of electrical parameters can be derived for a comprehensive electrical sample characterization.

What we offer

Get in touch with the Tensormeter – the new standard of resistance measurement. You can buy the Tensormeter to get the unlimited performance. You can rent the device to try it in your lab or you can send us your samples for first test measurements.

Learn more about Tensormeter

Contacts to Tensormeter Team

Dr. Tobias Kosub, Technical Development

Phone: +49 351 260 2900

t.kosub@hzdri.de

Bernd Heirler, Sales

Phone: +49 351 260 3326

b.heirler@hzdri.de