How simulations with TRIDYN and TRI3DYN work
Atomic collisions are simulated within the framework of the two-shock approximation, which enables very fast calculations even for large systems and high ion bombardment fluences. The irradiation parameters can be flexibly varied by choosing different energy and angular distributions. In static mode, the programmes provide three-dimensional spatial distributions of the implanted atoms and the generated point defects as well as energy and angular distributions of scattered ions and atomised atoms. The dynamic mode additionally describes the change of the irradiated material depending on the fluence of the incident ions, including the erosion or swelling of the surface, the build-up of thin layers as well as the change of the location-dependent element distribution. The simultaneous irradiation with several types of atoms, including slow atoms, enables, among other things, the simulation of thin-film deposition under ion irradiation.
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