A helium ion microscope, known for high resolution imaging and modification with helium or neon ions, was equipped with a time-of-flight spectrometer for analyzing the composition of the sample. The powerful add-on TSH300, is a secondary ion extraction optics with which all secondary ion masses can be measured in parallel. This reduces ion-induced influences on the sample to a minimum. The combination of high-resolution secondary electron images and laterally resolved element identification offers great potential for the analysis of nano and microstructures.
In addition, many depth profiles can be obtained by ion sputtering, which enables a look “under” the sample surface. In this way, element depth profiles of the sample can be determined. Thus, so-called end-point detection becomes available when it comes down to removing material only up to a certain interface.
