TSH 300

An Easy-to-Integrate Time of Flight Secondary Ion Mass Spectrometer for Helium / Neon Ion Microscopes


TSH 300 was developed at the Helmholtz-Zentrum Dresden-Rossendorf (HZDR) and is distributed by the HZDR Innovation GmbH.

For further information, pricing and quotation contact:


Tel.: +49 351 260 3617

Flyer TSH 300


For more information please refer to

Klingner, N., et al. "Time-of-flight secondary ion mass spectrometry in the helium ion microscope." Ultramicroscopy 198 (2019): 10-17. DOI: https://doi.org/10.1016/j.ultramic.2018.12.014